10.57647/mjee.2026.2001.07

Efficiency Improvement of MEMS-based Solar Cells by Optimizing the Structure and Dimensions of Piezoelectric-based Vertical Nanowires

  1. Department of Electrical Engineering, Isf.C., Islamic Azad University, Isfahan, Iran

Received: 2025-06-15

Revised: 2025-09-21

Accepted: 2025-12-15

Published in Issue 2026-03-31

How to Cite

Saljooghi, A., Saghafi, H., Yazdani , M. R., & Abbasian, M. (2026). Efficiency Improvement of MEMS-based Solar Cells by Optimizing the Structure and Dimensions of Piezoelectric-based Vertical Nanowires. Majlesi Journal of Electrical Engineering, 20(1 (March 2026). https://doi.org/10.57647/mjee.2026.2001.07

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Abstract

The global energy crisis and environmental challenges have drawn increasing attention from researchers toward the development of renewable energy technologies, particularly solar energy. Among the emerging technologies in this field, Micro-Electro-Mechanical Systems (MEMS) have gained considerable interest in recent years due to the relatively low efficiency of conventional photovoltaic modules. MEMS-based technologies offer a wide range of applications, including light control, thermal management, and enhancement of optical properties. Another technology that has recently attracted attention in solar energy research is piezoelectric technology. The integration of piezoelectric materials enables the generation of electrical energy from mechanical stresses induced by temperature differences across distinct surfaces, thereby enhancing the energy output and overall efficiency of solar cells. This article describes the structure of a hybrid solar cell based on MEMS technology, the use of vertical nanowires, and the piezoelectric properties of materials. It can be reached to higher efficiency by choosing suitable materials and changing some structural parameters. The proposed structure consists of a two-layer triangular cantilever (aluminum and silicon oxide). The piezoelectric layer is made arranging a different structure of nanowires and increasing the area covered by nanowires. Despite previous works present only one structure, this paper tries to present and compare different structures for more flexible structure selection. The simulation results using COMSOL software, show improved performance compared to similar researches. Based on the results, using the proposed structure, a variable voltage with a maximum value of 1.15 volts and the best efficiency of 46.11% (in a special structure) is obtained.

Keywords

  • Solar cells,
  • Micro-Electro-Mechanical Systems (MEMS),
  • Piezoelectric effect,
  • Vertical nanowire

References

  1. Torkashvand Z, Shayeganfar F, and Ramazani A. “Advances of materials science in MEMS applications: A review.” Results in Engineering 2024; 22:102115. doi: 10.1016/j.rineng.2024.102115
  2. Lyshevski SE. “MEMS and NEMS: Systems, Devices, and Structures”. 2002; CRC Press:3–18. doi: 10.1201/9781315220246
  3. Tayel MB and Ragab Y. “A novel design of a MEMS solar cell based on microcantilever-photoinduced bending.” International Conference on Innovative Engineering Systems, Alexandria, Egypt 2012 :41–45. doi: 10.1109/ICIES.2012.6530842
  4. Singh MM, Lim Y, and Manaf A. “Smart Home using Microelectromechanical Systems (MEMS) sensor and ambient intelligences (SA-HOMASI)”. Lecture Notes in Electrical Engineering 2018; 14:557–567. doi: 10.1007/978-981-13-2622-654
  5. Mishra M, Dubey V, Mishra PM, and Khan I. “MEMS Technology: A Review.” Journal of Engineering Research and Reports 2019; 4:1–24. doi: 10.9734/jerr/2019/v4i116891
  6. Sharma SK, Mishra RK, and Kumar A. “A re-view on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications.” Microsystem Technologies 2021; 27:765–786. doi: 10.1007/s00542-020-05025-y
  7. Goodnick SM and Honsberg C. “Solar cells. In: Handbook of Semiconductor Devices ”. 2022; Springer:699–745. doi: 10.1007/978-3-030-79827-719
  8. Vincent P, Shin SC, Goo J, You YJ, Cho B, Lee S, Lee DW, Kwon SR, Chung KB, Lee JJ, Bae JH, Shim JW, and Kim H. “Indoor-type photovoltaics with organic solar cells through optimal design.” Dyes and Pigments 2018; 159:306–313. doi: 10. 1016/j.dyepig.2018.06.025
  9. Lu L, Yang Z, Meacham K, Cvetkovic C, Corbin EA, Va´zquez-Guardado A, Xue M, Yin L, Boroumand J, Pakeltis G, Sang T, Yu KJ, Chanda D, Bashir R, Gereau RW, Sheng X, and Rogers JA. “Biodegradable monocrystalline silicon photo-voltaic microcells as power supplies for transient biomedical implants.” Advanced Energy Materials 2018; 8. doi: 10.1002/aenm.201703035
  10. Sun H, Yin M, Wei W, Li J, Wang H, and Jin X. “MEMS based energy harvesting for the Internet of Things: a survey.” Microsystem Technologies 2018; 24:2853–2869. doi: 10.1007/s00542-018-3763-z
  11. Patel S, Scheideler WJ, Karim MA, and Subramanian V. “Inkjet-printed MEM relays for active solar cell routing. ” IEEE Micro Electro Mechanical Systems (MEMS) Conf. 2018 :616–619. doi: 10.1109/memsys.2018.8346629
  12. Akbari A and Keshmiri SH. “Efficiency Enhancement of a Tandem Perovskite-Silicon Solar Cell.” Majlesi Journal of Electrical Engineering 2024; 18:1–7. doi: 10.57647/j.mjee.2024.180349
  13. Gai B, Geisz JF, Friedman DJ, Chen H, and Yoon J. “Printed assemblies of microscale triple-junction inverted metamorphic aInP/GaAs/InGaAs Solar Cells.” Progress in Photovoltaics: Research and Applications 2019; 27:520–527. doi: 10.1002/pip. 3127
  14. Kharel K and Freundlich A. “III-V dilute nitride quantum-engineered solar cell for lattice-matched silicon-based tandems.” Physics, Simulation, and Photonic Engineering of Photovoltaic Devices VIII 2019; 1:39–46. doi: 10.1117/12.2510813
  15. Green MA, Emery K, Hishikawa Y, Warta W, and Dunlop ED. “Solar Cell Efficiency Tables (version 45)”. Progress in Photovoltaics: Research and Applications 2014; 23:1–9. doi: 10.1002/pip. 2573
  16. Nielson GN, Okandan M, Cruz-Campa JL, Resnick PR, Sanchez CA, Sweatt WC, Lentine AL, Gupta VP, and Nelson JS. “Next generation photovoltaic cells and systems through MEMS technology.” ECS Transactions 2012; 44:1347–1352. doi: 10. 1149/1.3694470
  17. Yunus NHM, Sampe J, Yunas J, and Pawi A. “MEMS Based RF Energy Harvester for Battery-Less Remote Control: A Review.” American Journal of Applied Sciences 2017; 14:316–324. doi: 10.3844/ajassp.2017.316.324
  18. Mehdizadeh SN and Ganji BA. “Design and simulation of small size MEMS bimaterial cantilever solar cell using piezoelectric layer.” Mi-crosystem Technologies 2017; 23:5849–5854. doi: 10.1007/s00542-017-3491-9
  19. Kim K, Hwang MB, Jeong J, Min NK, and Kwon KH. “Micromachining of a bimorph Pb(Zr,Ti)O3(PZT) cantilever using MEMS process for energy harvesting application.” Journal of Nanoscience and Nanotechnology 2012; 12:6011–6015. doi: 10.1166/jnn.2012.6365
  20. Baughman DC. “Creation and optimization of novel solar cell power via bimaterial Piezoelectric MEMS device.” 2011; Ph.D. dissertation, Naval Postgraduate School, Monterey, California
  21. Zhu M, Worthington E, and Njuguna J. “Coupled piezoelectric-circuit FEA to study influence of a resistive load on power output of piezoelectric energy devices. ” Smart sensors, Actuators and MEMS IV 2009 :17–28. doi: 10.1117/12.822829
  22. Dang C, Zhang S, Li X, Wang Y, and Liu H. “System integration for solar-driven interfacial desalination.” Device 2024; 2:1–20. doi: 10.1016/j.device.2024.100361
  23. Beer FP, Jr. ERJ, DeWolf JT, Mazurek DF, Anderson PM, Hirth JP, and Lothe J. “Mechanics of Materials, 7th ed.” 2017; New York: McGraw-Hill:430–50. doi: 10.1036/9781260463510
  24. Xu Q, Gao A, Li Y, and Jin Y. “Design and optimization of piezoelectric cantilever beam vibration energy harvester. ” Micromachines 2022; 13:675. doi: 10.3390/mi13050675
  25. Voicu RC, Tibeica C, Mu¨ ller R, Dinescu A, Pus-tan M, and Birleanu C. “Design, simulation and testing of polymeric microgrippers with V-shaped electrothermal actuators and encapsulated heaters.” International Semiconductor Conference (CAS), Sinaia, Romania 2016 :89-92. doi: 10.1109/SMICND.2016.7783048
  26. Qiao S, Liu J, Fu G, Ren K, Li Z, Wang S, and Pan C. “ZnO nanowire based CIGS solar cell and its efficiency enhancement by the piezo-phototronic effect.” Nano Energy 2018; 49:508–514. doi: 10.1016/j.nanoen.2018.04.070
  27. Ganji BA and Teymurnejad R. “Efficiency improving of NEMS solar cell using piezoelectric nanowires.” Microsystem Technologies 2020; 27:649–657. doi: 10.1007/s00542-020-04967-7
  28. Mishra VL, Chauhan YK, and Verma KS. “Various Modeling Approaches of Photovoltaic Module: A Comparative Analysis.” Majlesi Journal of Electrical Engineering 2023; 17:117–131. doi: 10.30468/mjee.2023.1984023
  29. Ko¨ppel G, Amkreutz D, Sonntag P, Yang G, Swaaij RV, Isabella O, Zeman M, Rech B, and Becker C. “Periodic and random substrate textures for liquid-phase crystallized silicon thin-film solar cells.” IEEE Journal of Photovoltaics 2017; 7:85–90. doi: 10.1109/JPHOTOV.2016.2618605
  30. Wanleass M. “Systems and methods for advanced ultra-high-performance InP solar cells. ” 2017; U.S. Patent:131
  31. Sai H, Maejima K, Matsui T, Koida T, Matsubara K, Kondo M, Takeuchi Y, Sugiyama S, Katayama H, and Yoshida I. “Effect of front TCO layer on properties of substrate-type thin-film micro-crystalline silicon solar cells.” IEEE Journal of Photovoltaics 2015; 5:1528–1533. doi: 10.1109/JPHOTOV.2015.2478030