Effect of Gas Pressure on Plasma Characteristics of a 2.45 GHz ECR Ion Source
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Abstract
Electron cyclotron resonance ion source (ECRIS) is designed and simulated using COMSOL software. The 2.45 GHz microwave is injected through a coaxial cable into a cylindrical chamber with a diameter of 9 cm and a length of 10 cm. Two coils are employed to produce a flat-B magnetic field profile and two resonance zones on both sides of the chamber. Hydrogen gas plasma is simulated by considering H2, H2+ and H3+ ions, and H and H2 as neutrals. Finally, electron density and temperature are reported as a function of gas pressure. It is observed that as the gas pressure increases, the electron temperature decreases and the electron density decline following an initial increases.
Keywords
- ECRIS,
- Electron density,
- Electron temperature,
- Gas pressure,
- Plasma
10.57647/j.jtap.2024.1804.52
