Plasma Surface Interaction for Constant Mean Free Path

Abstract

In the present work, plasma surface interaction for constant mean free path has been investigated by choosing a three-component electronegative warm plasma where electrons are described by non-extensive statistics, and both negative and positive ions by fluid approach. Here, the finite value of ion-neutral collisions, the temperature of negative and positive ions, the mass of negative ions, and negative ion density have been considered to uncover the realistic situation. We have considered CF₄ electronegative plasma where CF₃⁺ and F^- are the dominant charged species formed. The influence of electronegativity and positive ion temperature on positive ion velocity, positive ion density, electric potential, and net space charge density have been analysed to uncover the realistic situation. The plasma sheath profile has been investigated for the very first time using this combination of charged species distribution.