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JTAP-01.10.2023

Journal of Theoretical and Applied Physics (JTAP)

Editor-in-Chief: Davoud Dorranian, PhD

Online ISSN: 2251-7235

Print ISSN: 2251-7227

Publishes Bimonthly

Influence of ion-neutral collision parameters on dynamic structure of magnetized sheath during plasma immersion ion implantation

AbstractA cold magnetized plasma sheath is considered to examine the gas pressure effect on the sheath dynamics. A fluid model is used to describe the plasma sheath dynamic. The governing fluid equations in the plasma are solved from plasma center to the target using the finite difference method and some convenient initial and boundary conditions […]