AbstractMesoporous silicon (mesoPSi) layers fabricated by the photoelectrochemical etching (PECE) method in hydrofluoric acid (HF) are active as carbon monoxide gas sensors. The modified porous silicon (PSi) can be used with noble metals to manufacture an effective gas sensor. Embedded gold, platinum, and palladium nanoparticles Au, Pt, and Pd-NPs could modify the surface morphology of […]
