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Keyword: Oxygen plasma

Annealing temperature effect on the properties of untreated and treated copper films with oxygen plasma

AbstractIn this work, the copper films were deposited on quartz substrates by DC magnetron sputtering method and then, the prepared films were annealed in air atmosphere at different annealing temperatures. Before annealing, some of the copper films, treated by oxygen plasma, for comparison of the results. The structural and morphological properties of the films have […]