In this paper, the optical images of glow discharge plasma and the finite element method simulation of the magnetic field strength in a balanced and two types of unbalanced DC circular planar magnetron sputtering sources are presented. The investigation showed that wherever the magnetic field strength is stronger, the intensity of light and the ionization […]
AbstractLangmuir probe measurements are performed in cylindrical dc glow discharge plasma. Plasma was generated in an evacuated glass tube, with circular plane disk electrodes. Measurements were carried out at different points along the axis of tube for different working pressures of pure argon and mixture of argon–oxygen gasses to obtain the plasma density and temperature […]
