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Original Article

Effect of Gas Pressure on Plasma Characteristics of a 2.45 GHz ECR Iion Source

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Abstract

Electron cyclotron resonance ion source (ECRIS) is designed and simulated using COMSOL software. The 2.45 GHz microwave is injected through a coaxial cable into a cylindrical chamber with a diameter of 9 cm and a length of 10 cm. Two coils are employed to produce a flat-B magnetic field profile and two resonance zones on both sides of the chamber. Hydrogen gas plasma is simulated by considering H2, H2+ and H3+ ions, and H and H2 as neutrals. Finally, electron density and temperature are reported as a function of gas pressure. It is observed that as the gas pressure increases, the electron temperature decreases and the electron density decline following an initial increases.

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