Adjusting the Operation Frequency of Cantilever Based Magnetoelectric Sensor

Authors

• Meisam Haghparast ¹
• Mohammad Mehdi Tehranchi * ^{1, 2}
• Seyedeh Mehri Hamidi ¹

1. Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran
2. Department of Physics, Shahid Beheshti University, Tehran, Iran

Abstract

Magnetoelectric sensors, based on magnetostrictive-piezoelectric composites, exhibit the highest sensitivity at electromechanical resonance frequencies. Consequently, adjusting the operation frequency of these sensors for various applications becomes crucial. Using comprehensive simulations based on the finite element method, different structures can be investigated to obtain the operation frequency, magnetoelectric coefficient, and sensitivity. The structures used comprise FeGa/AlN/Silicon sandwich composites in a cantilever-type configuration with the etched silicon substrate. The thickness and etching method of the substrate exert an effect on the mentioned parameters; hence, the operation frequency of these sensors can be adjusted by structural engineering.

Furthermore, this approach enables the identification of optimal structures for applications such as biosensors and energy harvesting. The proposed structure of lower operation frequency exhibits a magnetoelectric coefficient of 3622 V/cm.Oe at a resonance frequency of 965 Hz with a sensitivity of 11.0 . Subsequently, the superior proposed structure in terms of a magnetoelectric coefficient has 5120 V/cm.Oe at a resonance frequency of 1783 Hz, demonstrating a sensitivity of 3.9 .

Keywords

• Resonance frequency
• Finite element method
• Magnetoelectric coefficient
• Magnetic field sensor
• Magnetostrictive material