10.1186/2193-8865-3-54

Preparation of transparent, conductive ZnO:Co and ZnO:In thin films by ultrasonic spray method

  1. Material Sciences Department, Faculty of Science, University of Biskra, 07000, DZ
  2. VTRS Laboratory, Institute of Technology, University of El-Oued, 39000, DZ
  3. Mechanical Department, Faculty of Technology, University of Biskra, 07000, DZ
Cover Image

Published in Issue 15-07-2013

How to Cite

Benramache, S., Benhaoua, B., & Bentrah, H. (2013). Preparation of transparent, conductive ZnO:Co and ZnO:In thin films by ultrasonic spray method. Journal of Nanostructure in Chemistry, 3(1 (December 2013). https://doi.org/10.1186/2193-8865-3-54

HTML views: 40

PDF views: 128

Abstract

Abstract This paper examines the growth of undoped and doped thin films with (Co and In) on glass substrate at 350°C using ultrasonic spray technique. We have investigated the influence of doping concentrations ranging from 0 to 4 wt.% on structural, optical, and electrical properties of ZnO thin films. Zinc acetate dehydrate, CoCl 3 4H 2 O or InCl 3 , ethanol, and monoethanolamine were used as a starting materials, dopant source, solvent, and stabilizer, respectively. The X-ray diffraction analysis indicated that the undoped and doped ZnO thin films have polycrystalline nature and hexagonal wurtzite structure with (002) preferential orientation. The maximum average crystallite sizes of ZnO:Co and ZnO:In were 55.46 and 45.78 nm at concentrations of 2 wt.% Co and 3 wt.% In, respectively, indicating that the crystallinity of doped films improved after doping. The optical absorption spectra showed that all undoped and doped ZnO films are transparent within the visible wavelength region. The band gap energy of ZnO:Co thin films increased after doping from 3.25 to 3.36 eV; however, the optical gap of ZnO:In decreases after doping from 3.25 to 3.18 eV, indicating the increase and decrease, respectively, in the transition tail width. The electrical conductivity of doped films is stabilized after doping. Transparent, conductive Co-doped ZnO thin films deposited by ultrasonic spray technique are of good quality.

Keywords

  • ZnO,
  • Thin film,
  • Semiconductor doping,
  • Transparent conducting oxides,
  • Ultrasonic spray

References

  1. Ma et al. (2011) Effects of the substrate and oxygen partial pressure on the microstructures and optical properties of Ti-doped ZnO thin films (pp. 703-712) https://doi.org/10.1016/j.spmi.2011.09.012
  2. Ko et al. (2012) Effects of substrate temperature on the Ga-doped ZnO films as an anode material of organic light emitting diodes (pp. 933-941) https://doi.org/10.1016/j.spmi.2012.03.012
  3. Benramache et al. (2013) Influence of growth time on crystalline structure. Conductivity and optical properties of ZnO thin films
  4. Khomchenko et al. (2007) Fabrication and properties of ZnO:Cu and ZnO:Ag thin films (pp. 94-98) https://doi.org/10.1016/j.spmi.2007.04.016
  5. Venkatachalam et al. (2008) Preparation and characterization of Al doped ZnO thin films by PLD (pp. 127-135) https://doi.org/10.1016/j.spmi.2008.03.006
  6. Rahmane et al. (2010) Power and pressure effects upon magnetron sputtered aluminum doped ZnO films properties (pp. 5-10) https://doi.org/10.1016/j.tsf.2010.06.063
  7. Wang et al. (2005) Effect of the variation of temperature on the structural and optical properties of ZnO thin films prepared on Si (1 1 1) substrates using PLD (pp. 53-57) https://doi.org/10.1016/j.vacuum.2004.12.014
  8. Mosbah et al. (2005) Comparison of the structural and optical properties of zinc oxide thin films deposited by d.c. and r.f. sputtering and spray pyrolysis (pp. 293-296) https://doi.org/10.1016/j.surfcoat.2005.02.012
  9. Mosbah et al. (2006) Preparation of highly textured surface ZnO thin films (pp. 144-149) https://doi.org/10.1016/j.mseb.2006.01.005
  10. Bahsi and Oral (2007) Effects of Mn and Cu doping on the microstructures and optical properties of sol-gel derived ZnO thin films (pp. 672-678) https://doi.org/10.1016/j.optmat.2005.11.016
  11. Benramache et al. (2012) Effect of substrate temperature on the stability of transparent conducting cobalt doped ZnO thin films (pp. 093001-1) https://doi.org/10.1088/1674-4926/33/9/093001
  12. Yamada et al. (2007) Dependences of structural and electrical properties on thickness of polycrystalline Ga-doped ZnO thin films prepared by reactive plasma deposition (pp. 68-73) https://doi.org/10.1016/j.spmi.2007.04.080
  13. Duclère et al. (2005) Properties of Li-, P- and N-doped ZnO thin films prepared by pulsed laser deposition (pp. 397-405) https://doi.org/10.1016/j.spmi.2005.08.011
  14. Abed et al. (2011) Non-linear optical and electrical properties of ZnO doped Ni thin films obtained using spray ultrasonic technique (pp. 968-972) https://doi.org/10.1016/j.optmat.2011.01.018
  15. Benramache and Benhaoua (2012) Influence of substrate temperature and cobalt concentration on structural and optical properties of ZnO thin films prepared by ultrasonic spray technique (pp. 807-815) https://doi.org/10.1016/j.spmi.2012.06.005
  16. Djelloul et al. (2010) Photoluminescence, FTIR and X-ray diffraction studies on undoped and Al-doped ZnO thin films grown on polycrystalline α-alumina substrates by ultrasonic spray pyrolysis (pp. 2113-2117) https://doi.org/10.1016/j.jlumin.2010.06.002
  17. Zebbar et al. (2011) Structural, optical and electrical properties of n-ZnO/p-Si heterojunction prepared by ultrasonic spray (pp. 229-234) https://doi.org/10.1016/j.mssp.2011.03.001
  18. Benramache and Benhaoua (2012) Influence of annealing temperature on structural and optical properties of ZnO:In thin films prepared by ultrasonic spray technique (pp. 1062-1070) https://doi.org/10.1016/j.spmi.2012.08.006
  19. Kavak et al. (2009) Optical and photoconductivity properties of ZnO thin films grown by pulsed filtered cathodic vacuum arc deposition (pp. 540-544) https://doi.org/10.1016/j.vacuum.2008.04.021
  20. Wang and Chu (2008) Structural and optical properties of ZnO thin films on (111) CaF2 substrates grown by magnetron sputtering (pp. 54-61) https://doi.org/10.1016/j.spmi.2008.01.024
  21. Rolo et al. (2007) The annealing effect on structural and optical properties of ZnO thin films produced by r.f. sputtering (pp. 265-269) https://doi.org/10.1016/j.spmi.2007.04.069
  22. Zhang et al. (2011) Influence of deposition temperature on the crystallinity of Al-doped ZnO thin films at glass substrates prepared by RF magnetron sputtering method (pp. 644-653) https://doi.org/10.1016/j.spmi.2011.04.002
  23. Rani et al. (2008) Synthesis of nanocrystalline ZnO powder via sol-gel route for dye-sensitized solar cells (pp. 1639-1645) https://doi.org/10.1016/j.solmat.2008.07.015
  24. Benramache et al. (2012) Elaboration and characterisation of ZnO thin films (pp. 573-580) https://doi.org/10.1051/mattech/2012052
  25. Zhu et al. (2010) Low temperature annealing effects on the structure and optical properties of ZnO films grown by pulsed laser deposition (pp. 128-130)
  26. Bao et al. (1998) Sol-gel-derived c-axis oriented ZnO thin films (pp. 37-41) https://doi.org/10.1016/S0040-6090(97)00302-7
  27. Nian et al. (2010) Preparation and characterization of sol-gel Li and Al codoped ZnO thin films (pp. 157-160) https://doi.org/10.1016/j.matlet.2009.10.030
  28. Verma et al. (2010) Sol-gel derived aluminum doped zinc oxide for application as anti-reflection coating in terrestrial silicon solar cells (pp. 2649-2653) https://doi.org/10.1016/j.tsf.2009.08.010
  29. Wu et al. (2009) Electrical and optical properties of molybdenum-doped ZnO transparent conductive thin films prepared by dc reactive magnetron sputtering (pp. 125012-125014) https://doi.org/10.1088/0268-1242/24/12/125012
  30. Bouraiou et al. (2011) Potential effect on the properties of CuInSe2 thin films deposited using two-electrode system (pp. 1173-1178) https://doi.org/10.1016/j.cap.2011.02.014
  31. Benouis et al. (2010) The effect of indium doping on structural, electrical conductivity, photoconductivity and density of states properties of ZnO films (pp. 62-67) https://doi.org/10.1016/j.jallcom.2009.10.098
  32. Liu et al. (2012) Effects of Ti-doped concentration on the microstructures and optical properties of ZnO thin films (pp. 765-773) https://doi.org/10.1016/j.spmi.2012.06.021
  33. Chen et al. (2009) Microstructures, optical and electrical properties of In-doped ZnO thin films prepared by sol-gel method (pp. 6308-6312) https://doi.org/10.1016/j.apsusc.2009.02.007
  34. Keskenler et al. (2012) Investigation of structural and optical properties of ZnO films co-doped with fluorine and indium (pp. 107-115) https://doi.org/10.1016/j.spmi.2012.04.002
  35. Jung et al. (2009) Synthesis and investigation on the extrinsic carrier concentration of indium doped ZnO tetrapods (pp. 649-653) https://doi.org/10.1016/j.jallcom.2009.03.065
  36. Yousefi et al. (2012) Effect of indium concentration on morphology and optical properties of In-doped ZnO nanostructures (pp. 6295-6301) https://doi.org/10.1016/j.ceramint.2012.04.085
  37. Tubtimtae and Lee (2012) ZnO nanorods on undoped and indium-doped ZnO thin films as a TCO layer on nonconductive glass for dye-sensitized solar cells (pp. 987-996) https://doi.org/10.1016/j.spmi.2012.08.002
  38. Daranfed et al. (2009) Substrate temperature influence on ZnS thin films prepared by ultrasonic spray (pp. 1082-1084) https://doi.org/10.1016/j.tsf.2009.03.227
  39. Hafdallah et al. (2011) In doped ZnO thin films (pp. 7267-7270) https://doi.org/10.1016/j.jallcom.2011.04.058
  40. Mosbah and Aida (2012) Influence of deposition temperature on structural, optical and electrical properties of sputtered Al doped ZnO thin films (pp. 149-153) https://doi.org/10.1016/j.jallcom.2011.11.113
  41. Lucio-Lopez et al. (2006) Preparation of conducting and transparent indium-doped ZnO thin films by chemical spray (pp. 733-741) https://doi.org/10.1016/j.solmat.2005.04.010