OICC Press Journal of Nanostructure in Chemistry 2193-8865 3 1 (December 2013) 2013 07 15 Preparation of transparent, conductive ZnO:Co and ZnO:In thin films by ultrasonic spray method 10.1186/2193-8865-3-54 EN Said Benramache Material Sciences Department, Faculty of Science, University of Biskra, 07000, DZ Boubaker Benhaoua VTRS Laboratory, Institute of Technology, University of El-Oued, 39000, DZ Hamza Bentrah Mechanical Department, Faculty of Technology, University of Biskra, 07000, DZ Journal Article 2013 07 15 Abstract This paper examines the growth of undoped and doped thin films with (Co and In) on glass substrate at 350°C using ultrasonic spray technique. We have investigated the influence of doping concentrations ranging from 0 to 4 wt.% on structural, optical, and electrical properties of ZnO thin films. Zinc acetate dehydrate, CoCl 3 4H 2 O or InCl 3 , ethanol, and monoethanolamine were used as a starting materials, dopant source, solvent, and stabilizer, respectively. The X-ray diffraction analysis indicated that the undoped and doped ZnO thin films have polycrystalline nature and hexagonal wurtzite structure with (002) preferential orientation. The maximum average crystallite sizes of ZnO:Co and ZnO:In were 55.46 and 45.78 nm at concentrations of 2 wt.% Co and 3 wt.% In, respectively, indicating that the crystallinity of doped films improved after doping. The optical absorption spectra showed that all undoped and doped ZnO films are transparent within the visible wavelength region. The band gap energy of ZnO:Co thin films increased after doping from 3.25 to 3.36 eV; however, the optical gap of ZnO:In decreases after doping from 3.25 to 3.18 eV, indicating the increase and decrease, respectively, in the transition tail width. The electrical conductivity of doped films is stabilized after doping. Transparent, conductive Co-doped ZnO thin films deposited by ultrasonic spray technique are of good quality.