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Keyword: Threshold-voltage-adjust-implant

Original Article
Body Current Optimization Using Threshold-Voltage-Adjust-Implant Engineering in 45nm SOI MOSFET

In this paper, for the first time, Threshold-voltage-adjust-implant is engineered to optimize body current in 45 nm Silicon-on-Insulator (SOI) MOSFET. The peak value and peak position concentration of the Gaussian implant under the gate oxide in the silicon body are varied in order to optimize the body current in SOI technology. The variations affect the […]