AZIZOLLAH GANJI, Bahram; TAYBI, Mehdi. A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm. Majlesi Journal of Electrical Engineering, [S. l.], v. 11, n. 4, 2024. Disponível em: https://oiccpress.com/mjee/article/view/4800. Acesso em: 11 may. 2026.