OICC Press Majlesi Journal of Electrical Engineering 2345-3796 11 4 2024 02 18 A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm EN Bahram Azizollah Ganji Department of Electrical and Computer Engineering, Babol University of Technology, Babol Mehdi Taybi Department of Electrical and Computer Engineering, Babol University of Technology, Babol, Iran Journal Article 2024 02 18 In this paper we presented a novel MEMS acoustic sensor using corrugated diaphragm. The corrugated diaphragm is used to decrease the effect of residual stress and thus improve the sensitivity of micromachined acoustic sensor. The displacement and mechanical sensitivity of flat and corrugated diaphragms, and also open-circuit sensitivity and pull-in voltage of sensors are calculated using MATLAB and simulated using FEM (finite element method). The results show that the displacement and mechanical sensitivity of corrugated diaphragm are bigger than the flat one. The pull-in voltage of corrugated sensor is smaller and the open-circuit sensitivity is much higher than the sensor with flat diaphragm. The results also show that the analytical model is very close with FEM simulation results.