Optical imaging and magnetic field simulation of a DC circular planar magnetron sputtering discharge Ahmad Reza Rastkar*, Ali Reza Niknam, Mostafa Salahshoor, 10.57647/J.JTAP.2023.1704.38 Requires Subscription PDF Requires Subscription HTML downloads: 301 views: 2
10.57647/J.JTAP.2023.1704.38