OICC Press Journal of Solid Mechanics 2008-7683 3 4 2011 09 30 Study Of Thermoelastic Damping in an Electrostatically Deflected Circular Micro-Plate Using Hyperbolic Heat Conduction Model 271 282 EN G Rezazadeh Mechanical Engineering Department, Urmia University S Tayefeh-rezaei Mechanical Engineering Department, Urmia University A Saeedi Vahdat Photo-Acoustics Research Laboratory, Nanomechanics/Nanomaterials, Department of Mechanical & Aeronautical Engineering, Clarkson University, Potsdam, NY, USA V Nasirzadeh Mechanical Engineering Department, Islamic Azad University, Arak Branch Journal Article 2011 09 30 Thermoelastic damping (TED) in a circular micro-plate resonator subjected to an electrostatic pressure is studied. The coupled thermo-elastic equations of a capacitive circular micro plate are derived considering hyperbolic heat conduction model and solved by applying Galerkin discretization method. Applying complex-frequency approach to the coupled thermo-elastic equations, TED is obtained for different ambient temperatures. Effects of the geometrical parameters on TED and the critical thickness are investigated. Furthermore, the effect of applied bias DC voltage on TED for an electrostatically deflected micro-plate is also investigated.