TY - EJOUR
AU - Dorranian, Davoud
AU - Dejam, Laya
AU - Mosayebian, Gelareh
PY - 2023
DA - November
TI - Optical characterization of Cu3N thin film with Swanepoel method
T2 - Journal of Theoretical and Applied Physics
VL - 6
L1 - https://oiccpress.com/journal-of-theoretical-and-applied-physics/article/optical-characterization-of-cu3n-thin-film-with-swanepoel-method/
DO - 10.1186/2251-7235-6-13
N2 - bstractSwanepoel method is employed for spectroscopic determination of optical properties of Cu3N thin film using transmittance data. Investigated films have been deposited using reactive magnetron sputtering system. Deposition time was 9 to 21 min. Refractive index, absorption coefficient, and bandgap energy of the samples are determined. Thickness of the films is calculated by Swanepoel method, and result is compared with the thickness of the films measured by profilmeter. It is shown that Swanepoel method is a reliable way to calculate the optical constants of thin films when the transmittance spectrum of the film is influenced by wavelike patterns due to reflection of the probe beam from different interfaces.
IS - 1
PB - OICC Press
KW - 82.20.Fw, Copper nitride, Energy gap, Swanepoel method, Thin films, Magnetron sputtering, 68.55.Jk, 78.20.Ci, 81.05.Je 
EN -