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JTAP-01.10.2023

Journal of Theoretical and Applied Physics (JTAP)

Editor-in-Chief: Davoud Dorranian, PhD

Online ISSN: 2251-7235

Print ISSN: 2251-7227

Publishes Bimonthly

Structural, electrical, and decorative properties of sputtered zirconium thin films during post-annealing process

AbstractZirconium thin films were deposited on a glass substrate using direct current magnetron sputtering technique and then post-annealed at different temperatures (100°C to 500°C in steps of 100°C) in an oxygen constant flow. The dependence of crystallographic structure, surface morphology, chemical composition, and electrical and decorative properties of the films on the annealing temperature was […]