OICC Press Journal of Nanostructure in Chemistry 2193-8865 6 1 (March 2016) 2015 11 27 Study of conducting ITO thin film deposition on flexible polyimide substrate using spray pyrolysis 10.1007/s40097-015-0177-7 EN Rachita Rana Banasthali Vidyapith, Tonk, Rajasthan, 304 022, IN J. Chakraborty Defence Materials and Stores R & D Establishment (DMSRDE), Kanpur, UP, 208013, IN Santosh K. Tripathi Defence Materials and Stores R & D Establishment (DMSRDE), Kanpur, UP, 208013, IN M. Nasim Defence Institute of Bio-Energy Research, Haldwani, Uttarakhand, 263139, IN Journal Article 2015 11 27 Abstract Nanostructured indium tin oxide (ITO) thin films have been grown by chemical spray pyrolysis method on flexible polyimide (PI) polymeric substrates at various temperatures (400, 450 and 500 °C) using solutions of indium and tin chlorides as precursors. The composition, microstructure, surface morphology, thermal, electrical, and optical characteristics have been analysed by FT-IR, UV–Vis, X-ray diffraction, SEM, EDAX, atomic force microscopy, electrical measurements, TGA, etc. X-ray diffraction measurements employing Cu-K α radiation showed that the ITO films were polycrystalline with a cubic bixbyite structure. An increment in average grain size, electrical conductivity and optical transmittance was observed at higher substrate temperature. ITO-coated films maintained the mechanical properties and stability of the pristine PI films. The adhesion between surface ITO layers and PI matrix was found acceptable. Graphical Abstract