TY - EJOUR
AU - Hassani, S. Sadegh
AU - Sobat, Z.
PY - 2024
DA - March
TI - Studying of various nanolithography methods by using Scanning Probe Microscope
T2 - International Journal of Nano Dimension (Int. J. Nano Dimens.)
VL - 1
L1 - https://oiccpress.com/international-journal-of-nano-dimension/article/studying-of-various-nanolithography-methods-by-using-scanning-probe-microscope/
DO - 10.7508/ijnd.2010.03.001
N2 - The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithographical methods mostly based on making nano-structures is presented.
IS - 3
PB - OICC Press
KW - nanostructure, Nano-lithography, Atomic Force Microscopy, Scanning probe lithography, surface nano-modification 
EN -