TY - EJOUR
AU - Ganji, Bahram Azizollah
AU - Taybi, Mehdi
PY - 2024
DA - February
TI - A Novel High Sensitivity MEMS Acoustic Sensor using Corrugated Diaphragm
T2 - Majlesi Journal of Electrical Engineering
VL - 11
L1 - https://oiccpress.com/Majlesi-Journal-of-Electrical-Engineering/article/a-novel-high-sensitivity-mems-acoustic-sensor-using-corrugated-diaphragm/
N2 - In this paper we presented a novel MEMS acoustic sensor using corrugated diaphragm. The corrugated diaphragm is used to decrease the effect of residual stress and thus improve the sensitivity of micromachined acoustic sensor. The displacement and mechanical sensitivity of flat and corrugated diaphragms, and also open-circuit sensitivity and pull-in voltage of sensors are calculated using MATLAB and simulated using FEM (finite element method). The results show that the displacement and mechanical sensitivity of corrugated diaphragm are bigger than the flat one. The pull-in voltage of corrugated sensor is smaller and the open-circuit sensitivity is much higher than the sensor with flat diaphragm. The results also show that the analytical model is very close with FEM simulation results.
IS - 4
PB - OICC Press
KW - Stress, Acoustic sensor, Corrugated diaphragm, Sensitivity, MEMS 
EN -